MEMS Sensors for Harsh Environment Applications

Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in strategic market sectors such as automotive, avionics, oil well logging, and nuclear power. We will review recent advances in harsh-environment MEMS and NEMS sensors focusing on devices and materials. Widebandgap semiconductor candidates for high temperature (HT) applications will be discussed. The use of Micro-opto mechanical systems (MOEMS) for HT applications will be highlighted.